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Details
Crystallisation of Foturan (R) glass-ceramics
| Author | Evans, A.; Rupp, J. L. M.; Gauckler, L. J. | |
| Year | 2012 | |
| Type | Journal Article | |
| Journal | Journal of the European Ceramic Society | |
| Volume | 32 | |
| Issue | 1 | |
| Pages | 203-210 | |
| Date | Jan | |
| ISSN | 0955-2219 | |
| Accession Numer | WOS:000297451400022 | |
| Abstract | Photostructurable glass-ceramics are suitable for 3-dimensional microfabrication and, in some instances, can be used as an alternative material to silicon in the microfabrication of micro-electro-mechanical-system (MEMS) devices. Foturan (R) is a photosensitive lithium-aluminium-silicate glass that can be structured by an exposure to UV light, followed by a thermal treatment and an etching step. In this work, the crystallisation kinetics and microstructure evolution of unexposed and UV-exposed Foturan (R) are investigated by means of differential scanning calorimetry, X-ray diffraction and scanning electron microscopy. The glass transition temperature T(g), the apparent activation energy of crystallisation E(a) and the colour of UV-exposed Foturan (R) are discussed. It is shown that nucleation and crystallisation of UV-exposed Foturan (R) can be steered either as a function of temperature (non-isothermal) or as a function of time (isothermal). This is essential for the photostructuring and etching of Foturan (R) regarding the achievable feature sizes of 25 mu m for MEMS applications. (C) 2011 Elsevier Ltd. All rights reserved. | |
| Notes | Evans, Anna Rupp, Jennifer L. M. Gauckler, Ludwig J. | |
| URL |
Access publication [Website] |
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| Link to PDF | ||
| Record Number | 36 | |
| Group | nonmet |
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