Processing of nanostructured ceramics, micropatterning and micromolding

There are abundant approaches for generating small ceramic elements using powders as building blocks. Due to the scientific and technological experience in synthesis and control of many functional properties, powders may offer enhanced functionalities also for MEMS devices compared to thin films. For objects in the range of mm to 0.1 mm there are many processes available. Components with high aspect ratios of 100 or more are best molded using LIGA or related processes. Precision mechanical machining enables the fabrication of components with features of 50 to 100 ?µm with high aspect ratios at low cost. Considerably smaller structures in ceramics than 50 ?µm can be generated by MAPLE direct writing, soft lithography, standard photolithography and STM tip etching. Photonic band gap materials with periodicities in the range of 100 to 1000 nm can be generated by a number of schemes.

We research soft lithography techniques enabling small ceramic objects to be created on surfaces for e.g. sensors.

Processes such as embossing, casting in photo resist molds, micro contact printing, or capillary filling can fabricate these small ceramic components.

Please consult also the success stories of the Department.

For further information consult the papers from Schönholzer and Heule in our literature database.