 |
|
||||||||||
Details
Thin film growth of yttria stabilized zirconia by aerosol assisted chemical vapor deposition
| Author | Schlupp, M. V. F.; Prestat, M.; Martynczuk, J.; Rupp, J. L. M.; Bieberle-Huetter, A.; Gauckler, L. J. | |
| Year | 2012 | |
| Type | Journal Article | |
| Journal | Journal of Power Sources | |
| Volume | 202 | |
| Pages | 47-55 | |
| Date | Mar 15 | |
| ISSN | 0378-7753 | |
| Accession Numer | WOS:000300139100006 | |
| Abstract | Thin film growth of yttria stabilized zirconia (YSZ) using atmospheric aerosol assisted chemical vapor deposition (AA-CVD) from beta-diketonates is studied. The influence of nature and concentration of metal precursors and solvents on thin film growth, microstructure and composition is investigated as a function of deposition temperature. AA-CVD is able to produce smooth and homogeneous YSZ thin films of controlled thickness and stoichiometry. Amorphous, nanocrystalline or columnar microstructures can be obtained at deposition temperatures between 300 and 650 degrees C. In the same temperature regime, a transition from surface reaction to diffusion controlled film growth is observed. For applications as gas separating membranes, e.g. for micro-solid oxide fuel cell electrolytes, randomly oriented nanocrystalline microstructures with grain sizes in the range of 10 nm are promising. (C) 2011 Elsevier B.V. All rights reserved. | |
| Notes | Times Cited: 0 | |
| URL |
Access publication [Website] |
|
| Record Number | 779 | |
| Group | nonmet |
Wichtiger Hinweis:
Diese Website wird in älteren Versionen von Netscape ohne
graphische Elemente dargestellt. Die Funktionalität der
Website ist aber trotzdem gewährleistet. Wenn Sie diese
Website regelmässig benutzen, empfehlen wir Ihnen, auf
Ihrem Computer einen aktuellen Browser zu installieren. Weitere
Informationen finden Sie auf
folgender
Seite.
Important Note:
The content in this site is accessible to any browser or
Internet device, however, some graphics will display correctly
only in the newer versions of Netscape. To get the most out of
our site we suggest you upgrade to a newer browser.
More
information
!!! Dieses Dokument stammt aus dem ETH Web-Archiv und wird nicht mehr gepflegt !!!
!!! This document is stored in the ETH Web archive and is no longer maintained !!!
!!! This document is stored in the ETH Web archive and is no longer maintained !!!
