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Crystallization of 8 mol% yttria-stabilized zirconia thin-films deposited by RF-sputtering
| Author | Frison, R.; Heiroth, S.; Rupp, J. L. M.; Conder, K.; Barthazy, E. J.; Müller, E.; Horisberger, M.; Döbeli, M.; Gauckler, L. J. | |
| Year | 2013 | |
| Type | Journal Article | |
| Journal | Solid State Ionics | |
| Volume | 232 | |
| Pages | 29-36 | |
| Keywords | Ceramics; Crystallization; Grain growth; Keywords; RF-sputtering; Thin films; Yttria stabilized-zirconia | |
| Abstract | The crystallization upon thermal treatment of 8 mol% yttria-stabilized zirconia thin films deposited by RF-sputtering at room temperature is investigated. The as-deposited YSZ films are biphasic with crystallites of 5-10 nm in diameter building a columnar-like microstructure. Fully crystalline YSZ thin films are obtained after isothermal dwells in the temperature range 800-1100 C. X-ray diffraction and Raman spectroscopy demonstrate that the crystalline films have a cubic structure retained even after high-temperature annealing while a strong texture is developed. Further, a stagnating grain-growth is observed, characterized by a final grain size of about 60 nm and a micro-strain of 0.15%. Given the observed films' micro-structural stability, their application in miniaturized electrochemical devices such as micro-solid oxide fuel cells or sensors can be foreseen. © 2012 Elsevier B.V. | |
| Notes | Export Date: 12 January 2013 Source: Scopus |
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| Author Address | Laboratory for Development and Methods, Paul Scherrer Institut, 5232 Villigen-PSI, Switzerland General Energy Research Department, Paul Scherrer Institut, 5232 Villigen-PSI, Switzerland Massachusetts Institute of Technology (MIT), Department of Materials Science and Engineering, Department of Nuclear Science and Engineering, 77 Massachusetts Ave, Cambridge, MA 02139, United States Electron Microscopy ETH Zurich (EMEZ), ETH Zurich, Wolfgang Pauli Str. 16, 8093 Zurich, Switzerland Ion Beam Physics, ETH Zurich, 8093 Zurich, Switzerland Nonmetallic Inorganic Materials, Department of Materials, ETH Zurich, Wolfgang Pauli Str. 10, 8093 Zurich, Switzerland International Institute for Carbon Neutral Energy Research (WPI-I2CNER), Kyushu University, 744 Moto-oka, Nishi-ku, Fukuoka 819-0395, Japan |
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| Record Number | 10 | |
| Group | nonmet |
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